Abstract: The key to robust SPC control is the inline signals provided by metrology tools (e.g. CD-SEM, Overlay, film thickness measurement) and defect inspection tools (e.g. Surfscan, Broadband ...

From 20 Dec 2025 to 05 Jan 2026 the INSPIRE team works on a reduced schedule and it will take a bit longer than usual to address your requests. Best wishes for the season!

Thus even though normalizable modes appear in propagators with residues which are given as their finite normalization constants, non-normalizable modes can just as equally appear in propagators with ...

The goal of this paper is to define the quantum gravity wave function, in a manner consistent with current experiments, and to discuss interpretation of the imaginary number, “i ”. A gauge field ...